Experimental verification of field extension for non-homothetic arrays with a pupil-plane interferometer

Wide field interferometry has become a subject of increasing interest in the recent years. New methods have been suggested in order to avoid the drawbacks of the standard wide field method (homothetic mapping) which is not applicable when the aperture is highly diluted; for this reason imaging with non-homothetic arrays is being extensively...

Inverse propagation algorithm for angstrom accuracy interferometer

This paper will illustrate several approaches to retrieving the shape of aspherical reflective surfaces as used in EUV Lithography, from measurements from a previously reported angstrom-accuracy interferometer. First, the working principles of the interferometer will be reviewed, and typical measurement data expected from the instrument will be...