Spatially varying aberration calibration using a pair of matched periodic pinhole array masks

For advanced imaging systems, e.g., projection systems for optical lithography, spatially varying aberration calibration is of utmost importance to achieve uniform imaging performance over the entire field-of-view (FOV). Here we present an efficient, accurate, and robust spatially varying aberration calibration method using a pair of 2...

Noniterative spatially partially coherent diffractive imaging using pinhole array mask

We propose and experimentally demonstrate a noniterative diffractive imaging method for reconstructing the complex-valued transmission function of an object illuminated by spatially partially coherent light from the far-field diffraction pattern. Our method is based on a pinhole array mask, which is specially designed such that the...