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Joo, K.N. (author), Ellis, J.D. (author), Spronck, J.W. (author)Laser interferometer comprising a laser light source providing at least one light beam at two distinct frequencies, a beam splitter for splitting the at least one light beam into reference and measurement beams, a first reflector and a second reflector for reflection of the reference and measurement beams, and at least one detector for detection...patent 2010