Xu, M. (author), Shin, D. (author), Sberna, P.M. (author), van der Kolk, R.J.H. (author), Cupertino, A. (author), Bessa, M.A. (author), Norte, R.A. (author) For decades, mechanical resonators with high sensitivity have been realized using thin-film materials under high tensile loads. Although there are remarkable strides in achieving low-dissipation mechanical sensors by utilizing high tensile stress, the performance of even the best strategy is limited by the tensile fracture strength of the...
journal article 2023