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Hirai, Ryo (author), Pecnik, Rene (author), Kawai, Soshi (author)
In supersonic turbulent boundary layers over isothermal walls, we investigate how the wall heat flux affects turbulent statistics and velocity scaling laws. To distinguish local Reynolds number and compressibility effects, we consider a conventional ideal gas with Sutherland's law and a fluid for which the dynamic viscosity is proportional to...
journal article 2021
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Ma, X (author), Kato, Y (author), van Kempen, F.C.M. (author), Hirai, Y (author), Tsuchiya, T (author), van Keulen, A. (author), Tabata, O (author)
We report a multiple patterning approach utilizing digital-micromirror-device (DMD)-based grayscale lithography, providing a solution to improve fabrication accuracy for entire target three-dimensional structure. Because DMD-based lithography system consists a projection lens system, better resolution can be obtained around focal position...
conference paper 2015
document
Ma, X (author), Kato, Y (author), Hirai, Y (author), van Kempen, F.C.M. (author), van Keulen, A. (author), Tsuchiya, T (author), Tabata, O (author)
Digital Micromirror Device (DMD)-based grayscale lithography is a promising tool for three dimensional (3D) microstructuring of thick-film photoresist since it is a maskless process, provides possibility for the free-form of 3D microstructures, and therefore rapid and cost-effective microfabrication. However, process parameter determination...
conference paper 2015