Applied and fundamental studies of vibrating 2D membranes

This thesis encompasses both applied and fundamental studies of suspended van der Waals materials. Chapters 1 and 2 give an introduction to the field of 2D materials and some of the critical methods which facilitate the study of the suspended structures. In Chapters 3 and 4 we focus on the applications of graphene in barometric pressure sensors...

Multi-layer graphene Pirani pressure sensors

The operating principle of Pirani pressure sensors is based on the pressure dependence of a suspended strip's electrical conductivity, caused by the thermal conductance of the surrounding gas which changes the Joule heating of the strip. To realize such sensors, not only materials with high temperature dependent electrical conductivity are...

Dynamics of interacting graphene membranes

Micro and nanomechanical sensors are indispensable in modern consumer electronics, automotive and medical industries. Gas pressure sensors are currently the most widespread membrane-based micromechanical sensors. By reducing their size, their unit costs and energy consumption drops, making them more attractive for integration in new applications...

Graphene based piezoresistive pressure sensor

We present a pressure sensor based on the piezoresistive effect of graphene. The sensor is a 100?nm thick, 280??m wide square silicon nitride membrane with graphene meander patterns located on the maximum strain area. The multilayer, polycrystalline graphene was obtained by chemical vapor deposition. Strain in graphene was generated by applying...