FET-based charge sensor for organs-on-chip with in-situ electrode decoration

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FET-based integrated charge sensor for organ-on-chip applications

We present an extremely compact field effect transistor (FET)-based electrochemical sensor for in situ real-time and label-free measurement of ion concentrations in the cell culture area of organs-on-chip (OoCs) devices. This sensor replaces the functionality of an external reference electrode, crucial in standard electrochemical sensing, by...

Fabrication of Al-based superconducting high-aspect ratio TSVs for quantum 3D integration

We describe a microfabrication process that, thanks to a specifically tailored sidewall profile, enables for the first-time wafer-scale arrays of high-aspect ratio through-silicon vias (TSVs) coated with DC-sputtered Aluminum, achieving at once superconducting and CMOS-compatible 3D interconnects. Void-free conformal coating of up to 500μm...

Self-aligned micro-optic integrated photonic platform

In this work, we present the fabrication technology of a monolithically integrated photonic platform combining key components for optical coherence tomography (OCT) imaging, thereby including a photonic interferometer, a collimating lens, and a 45^◦ reflecting mirror that directs the light from the interferometer to the collimator....

Enabling actuation and sensing in organs-on-chip using electroactive polymers

•Actuation has been succesfully performed for 2h30 with no side effects nor<br/>delimination of the human tissue <br/>•0.1 % strain has been achieved during the actutaion mode, close to the<br/>strain experienced in vivo by vSMCs <br/>•0.72 V/mm sensitivity has been shown on the sensing mode <br/>•Batch fabrication and downscaling will be...

Sensor applications for organ-on-chip platforms

Monitoring cell conditions and microenvironment in real time is crucial for Organ-on-Chip (OoC) functionality. In particular, biological cues such as ions, including metals and metabolites, play a critical role in physiology and homeostasis in the human body. • Real-time monitoring of ions without optical systems is an unmet need for OOCs [1]. •...

A miniaturized EHT platform for contractile tissue measurements

We presented the smallest and best characterised EHT devices to date. The devices were fabricated by wafer-scale silicon and polymer processing, characterised by nanoindentation and finite-element simulations, and transferred to 96-well plates for cell seeding and optical tracking of bundle contraction. Cell bundles remained functional for at...

Vacuum assisted liquified metal (VALM) TSV filling method with superconductive material

A novel, simple, low-cost method for the void-free filling of high aspect ratio (HAR) through-silicon-vias (TSVs) is presented. For the first-time pure indium, a type-I superconductor metal, is used to fill HAR vias, 300 to 500 μm in depth and 50 to 100 μm in diameter. The low electrical resistivity achieved without sintering, its...