Position correction in ptychography using hybrid input-output (HIO) and cross-correlation

Ptychography is a form of coherent diffractive imaging; it employs far-field intensity patterns of the object to reconstruct the object. In ptychography, an important limiting factor for the reconstructed image quality is the uncertainty in the probe positions. Here, we propose a new approach which uses the hybrid input-output algorithm and...

Ptychography as a wavefront sensor for high-numerical aperture extreme ultraviolet lithography: Analysis and limitations

Wavefront aberration measurements are required to test an extreme ultraviolet (EUV) imaging system. For a high-NA EUV imaging system, where conventional wavefront-sensing techniques show limitations, ptychography can be used for this purpose. However, at the wavelength region of EUV (i.e., 13.5 nm), the position accuracy of the scanning mask...

Lateral position correction in ptychography using the gradient of intensity patterns

Ptychography, a form of Coherent Diffractive Imaging, is used with short wavelengths (e.g. X-rays, electron beams) to achieve high-resolution image reconstructions. One of the limiting factors for the reconstruction quality is the accurate knowledge of the illumination probe positions. Recently, many advances have been made to relax the...