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Saddle-point construction in the design of lithographic objectives, part 1: Method
Marinescu, O. (author), Bociort, F. (author)
journal article 2008
document
Saddle-point construction in the design of lithographic objectives, part 2: Application
Marinescu, O. (author), Bociort, F. (author)
journal article 2008
document
Optimization of extreme ultraviolet mirror systems comprising high-order aspheric surfaces
Marinescu, O. (author), Bociort, F. (author)
journal article 2008