Performance Improvement of Optical Algorithms on Multicore Platforms

ASML is one of the world's largest suppliers of lithography systems for the semiconductor industry. ASML designs and develops machines that are used to print circuits on silicon wafers, to produce IC chips. These circuits have to be printed with accuracy of up to 2nm. For this purpose, the machines incorporate several measurement systems. The...

Accelerating Computational Electromagnetic Diffraction Model on Programmable Graphics Processors

This thesis is done in the framework of wafer metrology to accelerate an electromagnetic diffraction model (EDM), which is used to measure the profile on a wafer, on programmable graphics processors (GPU). The main focus of this thesis is to investigate the suitability of EDM to GPU architectures. This study contributes with statistical data and...