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Westerveld, W.J. (author), Urbach, H.P. (author), Yousefi, M. (author)We present an accurate and fast 3D simulation scheme for out-of-plane grating couplers, based on two dimensional rigorous (finite difference time domain) grating simulations, the effective index method (EIM), and the Rayleigh-Sommerfeld diffraction formula. In comparison with full 3D FDTD simulations, the rms difference in electric field is...journal article 2011