Active Positioning and Passive Fixation using Friction: in Capacitive Displacement Measurement Applications

Sensor positioning is critical for achieving a measurement accuracy in the picometre range with capacitive displacement sensors. This thesis discusses the contradictory requirements that the sensor alignment application imposes: motion capability combined with extreme displacement stability. In addition, it explores three micrometre scale...

A novel interface circuit for grounded capacitive sensors with feedforward-based active shielding

Stability and accuracy of active shielding for grounded capacitive sensors