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Van der Heijden, R. (author), Kjellander, C. (author), Carlström, C.F. (author), Snijders, J. (author), Van der Heijden, R.W. (author), Bastiaansen, K. (author), Broer, D. (author), Karouta, F. (author), Nötzel, R. (author), Van der Drift, E. (author)Polymer filling of the air holes of indiumphosphide based two-dimensional photonic crystals is reported. The filling is performed by infiltration with a liquid monomer and solidification of the infill in situ by thermal polymerization. Complete hole filling is obtained with infiltration under ambient pressure. This conclusion is based both on...conference paper 2006
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Van der Heijden, R. (author), Andriesse, M.S.P. (author), Carlström, C.F. (author), Van der Drift, E. (author), Geluk, E.J. (author), Van der Heijden, R.W. (author), Karouta, F. (author), Nouwens, P. (author), Siang Oei, Y. (author), De Vries, T. (author)Chlorine-based inductively coupled plasma etching processes are investigated for the purpose of etching twodimensional photonic crystals in InP-based materials. Etch rates up to 3.7 µm/min and selectivity’s to the SiN mask up to 19 are reported. For the removal of indiumchloride etch products both the application of elevated temperatures and...conference paper 2004