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Lee, M. (author), Renshof, Johannes R. (author), van Zeggeren, K.J. (author), Houmes, M.J.A. (author), Lesne, E.L. (author), Siskins, M. (author), van Thiel, T.C. (author), Guis, R.H. (author), van Blankenstein, M.R. (author), Verbiest, G.J. (author), Caviglia, A. (author), van der Zant, H.S.J. (author), Steeneken, P.G. (author)Suspended piezoelectric thin films are key elements enabling high-frequency filtering in telecommunication devices. To meet the requirements of next-generation electronics, it is essential to reduce device thickness for reaching higher resonance frequencies. Here, the high-quality mechanical and electrical properties of graphene electrodes...journal article 2022
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Siskins, M. (author), Lee, M. (author), Wehenkel, D. (author), van Rijn, R. (author), de Jong, Tijmen W. (author), Renshof, Johannes R. (author), Hopman, Berend C. (author), Peters, Willemijn S.J.M. (author), Davidovikj, D. (author), van der Zant, H.S.J. (author), Steeneken, P.G. (author)The high flexibility, impermeability and strength of graphene membranes are key properties that can enable the next generation of nanomechanical sensors. However, for capacitive pressure sensors, the sensitivity offered by a single suspended graphene membrane is too small to compete with commercial sensors. Here, we realize highly sensitive...journal article 2020