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Polynomial Chaos Expansion-Based Enhanced Gaussian Process Regression for Wind Velocity Field Estimation from Aircraft-Derived Data

Marinescu, M. (author), Olivares, Alberto (author), Staffetti, Ernesto (author), Sun, Junzi (author)

This paper addresses the problem of spatiotemporal wind velocity field estimation for air traffic management applications. Using data obtained from aircraft, the eastward and northward components of the wind velocity field inside a specific air space are calculated as functions of time. Both short-term wind velocity field forecasting and wind...

journal article 2023

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On the Estimation of Vector Wind Profiles Using Aircraft-Derived Data and Gaussian Process Regression

Marinescu, Marius (author), Olivares, Alberto (author), Staffetti, Ernesto (author), Sun, Junzi (author)

This work addresses the problem of vertical wind profile online estimation at a given location. Specifically, the north and east components of the wind are continuously estimated as functions of time and altitude at two waypoints used for landing on the Adolfo Suarez Madrid-Barajas airport. A continuous nowcast of the wind profile is...

journal article 2022

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Wind velocity field estimation from aircraft derived data using Gaussian process regression

Marinescu, Marius (author), Olivares, Alberto (author), Staffetti, Ernesto (author), Sun, Junzi (author)

Wind velocity field knowledge is crucial for the future air traffic management paradigm and is key in many applications, such as aircraft performance studies. This paper addresses the problem of spatio-temporal windc velocity field estimation. The north and east wind components within a given air space are estimated as a function of time. Both...

journal article 2022

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Wind Profile Estimation from Aircraft Derived Data Using Kalman Filters and Gaussian Process Regression

Sun, Junzi (author), Marinescu, M. (author), Olivares, Alberto (author), Staffetti, Ernesto (author)

Accurate wind information is crucial in air traffic management, for instance, to improve trajectory predictability and precision in controlled time of arrival. Nowadays, air traffic management relies on Numerical Weather Prediction, which usually has a low resolution and low update rate. A potential approach for improving the resolution and...

conference paper 2021

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Saddle-point construction in the design of lithographic objectives, part 1: Method

Marinescu, O. (author), Bociort, F. (author)

journal article 2008

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Saddle-point construction in the design of lithographic objectives, part 2: Application

Marinescu, O. (author), Bociort, F. (author)

journal article 2008

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Optimization of extreme ultraviolet mirror systems comprising high-order aspheric surfaces

Marinescu, O. (author), Bociort, F. (author)

journal article 2008

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Network search method in the design of extreme ultraviolet lithographic objectives

Marinescu, O. (author), Bociort, F. (author)

The merit function space of mirror system for extreme ultraviolet (EUV) lithography is studied. Local minima situated in the multidimensional optical merit function space are connected via links that contain saddle points and form a network. We present networks for EUV lithographic objective designs and discuss how these networks change when...

journal article 2007

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Practical guide to saddle-point construction in lens design

Bociort, F. (author), Van Turnhout, M. (author), Marinescu, O. (author)

Saddle-point construction (SPC) is a new method to insert lenses into an existing design. With SPC, by inserting and extracting lenses new system shapes can be obtained very rapidly, and we believe that, if added to the optical designer’s arsenal, this new tool can significantly increase design productivity in certain situations. Despite the...

conference paper 2007

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Method of designing a projection system, lithographic apparatus and device manufacturing method

Bociort, F. (author), Van Turnhout, M. (author), Marinescu, O.E. (author)

Optimization of a projection system is performed to obtain a starting configuration that is at a local minimum of the merit function or simply a previously known minimum system is used as the starting configuration. A zero-thickness meniscus lens is inserted at a surface in the local minimum starting configuration with N surfaces to construct a...

patent 2007

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Projection system design method, lithography apparatus, and device manufacturing method

Botsuioruto, F. (author), Van Turnhout, M. (author), Marinescu, O.E. (author)

PROBLEM TO BE SOLVED: To provide a method of designing a projection system for a lithography projection apparatus, to provide a lithography apparatus comprising the projection system, and to provide a method for manufacturing a device by using the projection system. ; SOLUTION: In the first place, local optimization of the projection system is...

patent 2007

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Designing lithographic objectives by constructing saddle points

Marinescu, O. (author), Bociort, F. (author)

Optical designers often insert or split lenses in existing designs. Here, we present, with examples from Deep and Extreme UV lithography, an alternative method that consists of constructing saddle points and obtaining new local minima from them. The method is remarkable simple and can therefore be easily integrated with the traditional design...

conference paper 2006

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Novel design methods for high-quality lithographic objectives

Marinescu, O.E. (author)

This thesis discusses some of the challenges of optical design for Extreme Ultraviolet (EUV) mirror systems and illustrates novel design techniques and their application to, preponderantly, EUV systems and, in addition, some Deep Ultraviolet (DUV) lithographic objectives. The main added value of this thesis is the fact that it shows how...

doctoral thesis 2006

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Designing Lithographic Objectives by Constructing Saddle Points

Marinescu, O. (author), Bociort, F. (author)

Optical designers often insert or split lenses in existing designs. Here, we present, with examples from Deep and Extreme UV lithography, an alternative method that consists of constructing saddle points and obtaining new local minima from them. The method is remarkable simple and can therefore be easily integrated with the traditional design...

conference paper 2006

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Saddle points in the merit function landscape of lithographic objectives

Marinescu, O. (author), Bociort, F. (author)

The multidimensional merit function space of complex optical systems contains a large number of local minima that are connected via links that contain saddle points. In this work, we illustrate a method to construct such saddle points with examples of deep UV objectives and extreme UV mirror systems for lithography. The central idea of our...

conference paper 2005

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The network structure of the merit function space of EUV mirror systems

Marinescu, O. (author), Bociort, F. (author)

The merit function space of mirror systems for EUV lithography is studied. Local minima situated in a multidimensional merit function space are connected via links that contain saddle points and form a network. In this work we present the first networks for EUV lithographic objectives and discuss how these networks change when control parameters...

conference paper 2005

document

Networks of local minima for EUV mirror systems

Marinescu, O.E. (author), Bociort, F. (author), Braat, J.J.M. (author)

Poster presentation Optics Research Group TU Delft in cooperation with ASM Lithograpy and TNO

journal article 2005

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Generation of optical systems for lithography via saddle points

Braat, J.J.M. (author), Marinescu, O.E. (author), Bociort, F. (author)

Poster presentation Optics Research Group TU Delft in cooperation with ASM Lithograpy and TNO

journal article 2005

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Networks of local minima for extreme ultraviolet lithographic objectives

Bociort, F. (author), Marinescu, O.E. (author)

Poster presentation Optics Research Group TU Delft in cooperation with ASM Lithograpy and TNO

journal article 2005

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Avoiding unstable regions in the design space of EUV mirror systems comprising high-order aspheric surfaces

Marinescu, O. (author), Bociort, F. (author), Braat, J. (author)

When Extreme Ultraviolet mirror systems having several high-order aspheric surfaces are optimized, the configurations often enter into highly unstable regions of the parameter space. Small changes of system parameters lead then to large changes in ray paths, and therefore optimization algorithms crash because certain sssumptions upon which they...

conference paper 2004