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Huang, Y. (author), Pandraud, G. (author), Sarro, P.M. (author)TiO2 is an interesting and promising material for micro-/nanoelectromechanical systems (MEMS/NEMS). For high performance and reliable MEMS/NEMS, optimization of the optical characteristics, mechanical stress, and especially surface smoothness of TiO2 is required. To overcome the roughness issue of the TiO2 films due to crystallization during...journal article 2012
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Alan, T. (author), Yokosawa, T. (author), Gaspar, J. (author), Pandraud, G. (author), Paul, O. (author), Creemer, F. (author), Sarro, P.M. (author), Zandbergen, H.W. (author)Transmission electron microscopy (TEM) of (de-)hydrogenation reactions is crucial to characterize efficiency of hydrogen storage materials. The nanoreactor, a micromachined channel with 15-nm-thick windows, effectively confines the gas flow to an electron-transparent chamber during TEM of reactions. Realistic experiments require very high...journal article 2012