Artificial Dielectric Layer Based on PECVD Silicon Carbide for Terahertz Sensing Applications

The refractive index of a conventional dielectric layer can be enhanced using an Artificial Dielectric Layer (ADL). Here we present the fabrication of low temperature PECVD Silicon Carbide (SiC) membranes with very high refractive index (up to 5 at 1 THz) in the terahertz frequency range. The SiC deposition parameters have been tuned to reach a...

Some properties of a room temperature THz detection array

Detection peculiarities of an un-cooled (room temperature) 8×8 pixel array designed to image broadband THz radiation were investigated. Each pixel consists of a thin conductive film absorber on a dielectric membrane with thermopile temperature readout. It was designed and tested for four combinations of two different types of absorber and...