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In-package MEMS-based thermal actuators for micro-assembly

Henneken, V.A. (author), Tichem, M. (author), Sarro, P.M. (author)

journal article 2006

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Silicon micromachining of high aspect ratio, high-density through-wafer electrical interconnects for 3-D multichip packaging

Nguyen, N.T. (author), Wien, W.A.H. (author), Schellevis, H. (author), Sarro, P.M. (author), Burghartz, J.N. (author)

journal article 2006

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Evaluation of an Empirical Model to Estimate and Optimize Mechanical Properties of PECVD SiC Films

Pham, H.T.M. (author), De Boer, C.R. (author), Visser, C.C.G. (author), Sarro, P.M. (author)

In this paper, we present a systematic investigation of the influence of the deposition parameters on the deposition rate, etch rate, and mechanical stress of SiC films prepared by plasma-enhanced chemical vapor deposition (PECVD) technique. Among the relevant deposition parameters, the SiH4 gas flow rate, the main parameter to determine the Si...

journal article 2005

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Polarization-insensitive PECVD SiC waveguides for photonic sensing

Pandraud, G. (author), Pham, H.T.M. (author), Pakula, L.S. (author), Sarro, P.M. (author), French, P.J. (author)

Planar silicon carbide (SiC) waveguides are proposed for fabrication on a silicon substrate with a oxide isolation layer. Using post deposition annealing it is possible to achieve low Polarization-Dependent Loss (PDL) within optical SiC waveguides fabricated using a low temperature deposition technique. Those waveguides have been successfully...

conference paper 2005

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Microfluidic device for carrying out a reaction

Iordanov, V. (author), Bastemeijer, J. (author), Bossche, A. (author), Sarro, P.M. (author)

A device for carrying out a reaction, which device comprises a wafer provided with a group of at least two wells. The wells are thermally separate from each other by means of a groove in a layer of the device, while parts separated by the groove are locally connected by bridges. In this way a device is provided combining great mechanical...

patent 2005

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Spray coating of photoresist for pattern transfer on high topography surfaces

Pham, N.P. (author), Burghartz, J.N. (author), Sarro, P.M. (author)

journal article 2005

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Microelectronics: A macro world

Sarro, P.M (author)

public lecture 2005

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Silicon micro-optics for smart light control

Vdovin, G. (author), De Lima Monteiro, D.W. (author), Akhzar-Mehr, O. (author), Loktev, M. (author), Sakarya, S. (author), Soloviev, O. (author), Sarro, P.M. (author)

We present an overview of the results of our recent research in the field of adaptive optical components based on silicon microtechnologies, including membrane deformable mirrors, spatial light modulators, liquid-crystal correctors, wavefront sensors, and both spherical and aspherical micro-optical components. We aim at the realization of...

conference paper 2004

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Filter-protected photodiodes for high-throughput enzymatic analysis

Iordanov, V.P. (author), Bastemeijer, J. (author), Ishihara, R. (author), Sarro, P.M. (author), Bossche, A. (author), Vellekoop, M.J. (author)

journal article 2004

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Photoresist coating methods for the integration of novel 3-D RF microstructures

Boellaard, E. (author), Burghartz, J.N. (author), Sarro, P.M. (author)

journal article 2004

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M3: The third dimension of silicon

Sarro, P.M. (author)

public lecture 2003

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Method of performing an assay, apparatus therefor, and a method of manufacturing and apparatus

Iordanov, V.P. (author), Sarro, P.M. (author), Wolffenbuttel, R.F. (author), Vellekoop, M.J. (author)

The invention relates to a method of transforming a colour image, wherein for each separate pixel a measured level of lightness, a measured chroma and a measured colour is determined, followed by a predetermined adjustment in the three-dimensional level of lightness, chroma and colour, wherein a. for each separate pixel a direction of adjustment...

patent 2002

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Multi-anode sawtooth SDD for X-ray spectroscopy fabricated on NTD wafers

Sonsky, J. (author), Hollander, R.W. (author), van Eijk, C.W.E. (author), Sarro, P.M. (author), Kouchpil, V. (author)

journal article 2001

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IC-compatible two-level bulk micromachining process module for RF silicon technology

Sarro, P.M. (author), Ng, K.T. (author), Burghartz, J.N. (author)

journal article 2001

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Thin photodiodes for a neutron scintillator silicon-well detector

Allier, C.P. (author), Hollander, R.W. (author), van Eijk, C.W.E. (author), Sarro, P.M. (author), de Boer, M. (author), Czirr, J.B. (author), Chaminade, J.P. (author), Fouassier, C. (author)

journal article 2001

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Microarrays for biotechnology: The imaging challenge

Van den Doel, L.R. (author), Vellekoop, M.J. (author), Sarro, P.M. (author), Moerman, R. (author), Frank, J. (author), Van Dedem, G. (author), Hjelt, K.T. (author), Van Vliet, L.J. (author), Young, I.T. (author)

conference paper 2000

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Scintillation light read-out by low-gain thin avalanche photodiodes in silicon wells

Allier, C.P. (author), Hollander, R.W. (author), Sarro, P.M. (author), de Boer, M. (author), van Eijk, C.W.E. (author)

journal article 2000

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X-ray detection with multi-anode sawtooth silicon drift detectors

Sonsky, J. (author), Huizenga, J. (author), Hollander, R.W. (author), van Eijk, C.W.E. (author), Sarro, P.M. (author)

journal article 2000

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Electron confinement in multi-anode saw tooth silicon drift detectors with an anode pitch of 250 µm

Sonsky, J. (author), Valk, H. (author), Huizenga, J. (author), Hollander, R.W. (author), van Eijk, C.W.E. (author), Sarro, P.M. (author)

journal article 1999

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Diminished electron cloud broadening in a silicon drift detector by sawtooth p+ strips

Sonsky, J. (author), Valk, H. (author), Allier, C.P. (author), Hollander, R.W. (author), van Eijk, C.W.E. (author), Sarro, P.M. (author)

journal article 1999