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Zwerver, A.M.J. (author), Krähenmann, T.S. (author), Amitonov, S. (author), Boter, J.M. (author), Droulers, G. (author), Lodari, M. (author), Samkharadze, Nodar (author), Zheng, G. (author), Scappucci, G. (author), Veldhorst, M. (author), Vandersypen, L.M.K. (author)
Full-scale quantum computers require the integration of millions of qubits, and the potential of using industrial semiconductor manufacturing to meet this need has driven the development of quantum computing in silicon quantum dots. However, fabrication has so far relied on electron-beam lithography and, with a few exceptions, conventional...
journal article 2022