Spatio-Temporal Analysis of Overactuated Motion Systems: A Mechanical Modeling Approach

Flexible dynamics in motion systems lead to inherent spatio-temporal system behavior. The aim of this paper is to develop an unified approach for the identification of modal models of spatio-temporal overactuated systems. The approach exploits the modal modeling framework and the overactuated setting to enhance the estimation of the spatial...

A One-step Approach for Centralized Overactuated Motion Control of a Prototype Reticle Stage

Next-generation motion stages are envisaged to be lightweight to meet stringent demands regarding accuracy and throughput. The lightweight stage design implies flexible dynamical behavior, which is foreseen to be severely excited due to increasing acceleration forces. The aim of this paper is to exploit additional actuators and sensors to...