Kouwenhoven, K. (author), Fan, D. (author), Biancalani, Enrico (author), de Rooij, S.A.H. (author), Karim, A.T. (author), Smith, C.S. (author), Murugesan, Vignesh (author), Thoen, David (author), Baselmans, J.J.A. (author), de Visser, P.J. (author) Kinetic inductance detectors (KIDs) are superconducting energy-resolving detectors, sensitive to single photons from the near-infrared to ultraviolet. We study a hybrid KID design consisting of a β-phase tantalum (β-Ta) inductor and a Nb-Ti-N interdigitated capacitor. The devices show an average intrinsic quality factor Qi of 4.3×105±1.3×105....
journal article 2023
