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Westerveld, W.J. (author), Leinders, S.M. (author), Muilwijk, P.M. (author), Pozo, J. (author)
Microscale strain gauges are widely used in micro electro-mechanical systems (MEMS) to measure strains such as those induced by force, acceleration, pressure or sound. We propose all-optical strain sensors based on micro-ring resonators to be integrated with MEMS. We characterized the strain-induced shift of the resonances of such devices....
journal article 2013