Towards a heat transfer based distance sensor for measuring sub-micrometer separations

In this thesis a proof-of-principle demonstration is developed that uses the heat flux between a probe and a sample as a proxy for their separation. The proposed architecture uses a probe that consists of a bilayer cantilever with an attached sphere at its free end. The deflection of the cantilever that is caused by the heat input is measured...

Design of a calorimeter for near-field heat transfer measurements and thermal scanning probe microscopy

Multilayer cantilever beams are used in the measurement of near-field radiative heat transfer. The materials and dimensions of the cantilever probe are chosen in order to improve system performance in terms of sensitivity and noise. This is done using an analytical model that describes the thermo-mechanical and mechanical behavior of the...

A new horizon: Using heat to measure distance in high performance metrology solutions

Towards an effective reduction of intensity noise in laser diodes

Meta-instrument: An opto-mechanical platform for imaging near-field optical instruments

Reduction of laser diode intensity noise in optical beam defection systems

Meta-instrument: An opto-mechanical platform for imaging near-field optical instruments

Non-contact distance measurement and profilometry using thermal near-field radiation towards a high resolution inspection and metrology solution

Optical near-field technologies such as solid immersion lenses and hyperlenses are candidate solutions for high resolution and high throughput wafer inspection and metrology for the next technology nodes. Besides sub-diffraction limited optical performance, these concepts share the necessity of extreme proximity to the sample at distances that...

Phase lag deduced information in photo-thermal actuation for nano-mechanical systems characterization

In photo-thermal actuation, heat is added locally to a micro-cantilever by means of a laser. A fraction of the irradiation is absorbed, yielding thermal stresses and deformations in the structure. Harmonic modulation of the laser power causes the cantilever to oscillate. Moreover, a phase lag is introduced which is very sensitive to the spot...

Multi-modal image registration: Matching MRI with histology

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