Siskins, M. (author), Lee, M. (author), Wehenkel, D. (author), van Rijn, R. (author), de Jong, Tijmen W. (author), Renshof, Johannes R. (author), Hopman, Berend C. (author), Peters, Willemijn S.J.M. (author), Davidovikj, D. (author), van der Zant, H.S.J. (author), Steeneken, P.G. (author) The high flexibility, impermeability and strength of graphene membranes are key properties that can enable the next generation of nanomechanical sensors. However, for capacitive pressure sensors, the sensitivity offered by a single suspended graphene membrane is too small to compete with commercial sensors. Here, we realize highly sensitive...
journal article 2020
