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Hemmes, K. (author), Koops, K.R. (author)
Ellipsometer having light source means which provide a first light beam (g1) having a first angular frequency ( omega 1) and a second light beam (g2) having a second angular frequency ( omega 2), a neutral beam splitter (N) having a front face for receiving a measuring beam (g'm2), which during operation is produced by scanning a sample (S;OD1...
patent 1998