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Thermodynamic Calculations on the Chemical Vapor-Deposition of Silicon-Nitride and Silicon from Silane and Chlorinated Silanes

Kruis, F.E. (author), Scarlett, B. (author), Bauer, R.A. (author), Schoonman, J. (author)

journal article 1992

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Laser Synthesis of Low-Agglomerated Submicrometer Silicon-Nitride Powders from Chlorinated Silanes

Bauer, R.A. (author), Becht, J.G.M. (author), Kruis, F.E. (author), Scarlett, B. (author), Schoonman, J. (author)

journal article 1991

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Laser Cvp of Ultrafine Ceramic Powders of Si and Si3n4 - a Study of the Flow Pattern of the Laser Flame

Bauer, R.A. (author), Kruis, F.E. (author), Becht, J.G.M. (author), Scarlett, B. (author), Schoonman, J. (author)

journal article 1989