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Laser vapor phase synthesis of submicron silicon and silicon nitride powders from halogenated silanes

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conference paper 1988

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Laser excited synthesis of sub-micron powders

Becht, J.G.M. (author), Bauer, B.A. (author), Van der Put, P.J. (author), Schoonman, J. (author), Scarlett, B. (author)

conference paper 1989

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Laser vapor-phase synthesis of submicron silicon and silicon nitride powders from chlorinated silanes

Bauer, R.A. (author), Van der Put, P.J. (author), Becht, J.G.M. (author), Schoonman, J. (author)

journal article 1988

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Laser Chemical Vapor Precipitation of Submicrometer Silicon and Silicon-Nitride Powders from Chlorinated Silanes

Bauer, R.A. (author), Smulders, R. (author), Becht, J.G.M. (author), Van der Put, P.J. (author), Schoonman, J. (author)

journal article 1989

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Laser Cvp of Ultrafine Ceramic Powders of Si and Si3n4 - a Study of the Flow Pattern of the Laser Flame

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journal article 1989

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Laser Synthesis of Low-Agglomerated Submicrometer Silicon-Nitride Powders from Chlorinated Silanes

Bauer, R.A. (author), Becht, J.G.M. (author), Kruis, F.E. (author), Scarlett, B. (author), Schoonman, J. (author)

journal article 1991