A new horizon: Using heat to measure distance in high performance metrology solutions

Towards an effective reduction of intensity noise in laser diodes

Meta-instrument: An opto-mechanical platform for imaging near-field optical instruments

Non-contact distance measurement and profilometry using thermal near-field radiation towards a high resolution inspection and metrology solution

Optical near-field technologies such as solid immersion lenses and hyperlenses are candidate solutions for high resolution and high throughput wafer inspection and metrology for the next technology nodes. Besides sub-diffraction limited optical performance, these concepts share the necessity of extreme proximity to the sample at distances that...

Phase lag deduced information in photo-thermal actuation for nano-mechanical systems characterization

In photo-thermal actuation, heat is added locally to a micro-cantilever by means of a laser. A fraction of the irradiation is absorbed, yielding thermal stresses and deformations in the structure. Harmonic modulation of the laser power causes the cantilever to oscillate. Moreover, a phase lag is introduced which is very sensitive to the spot...

Reduction of laser diode intensity noise in optical beam defection systems

Meta-instrument: An opto-mechanical platform for imaging near-field optical instruments