Insights into the effect of susceptor rotational speed in CVD reactor on the quality of 4H-SiC epitaxial layer on homogeneous substrates

In this work, 4H-SiC homoepitaxial layers were grown on 4°off-axis substrates at different susceptor rotation speeds by using a hot-wall horizontal CVD reactor. The effect of different susceptor rotation speed on the quality of 4H-SiC epitaxial layers in terms of thickness, thickness uniformity, crystallinity, surface morphology and...

基于注意力机制的城市轨道交通网络级多步短时客流时空综合预测模型

Accurate and reliable short- term passenger flow prediction can support operations and decision-making of the URT system from multiple perspectives. In this paper, we propose a URT multi- step short- term passenger flow prediction model at the network level based on a Transformer-based LSTM network, Depth-wise Attention Block, and CNN network...

Towards understanding and prediction of atmospheric corrosion of an Fe/Cu corrosion sensor via machine learning

The atmospheric corrosion of carbon steel was monitored by a Fe/Cu type galvanic corrosion sensor for 34 days. Using a random forest (RF)-based machine learning approach, the impacts of relative humidity, temperature and rainfall were identified to be higher than those of airborne particles, sulfur dioxide, nitrogen dioxide, carbon monoxide...