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Kolenov, D. (author), Davidse, D. (author), Le Cam, J. (author), Pereira, S.F. (author)The analysis of 2D scattering maps generated in scatterometry experiments for detection and classification of nanoparticles on surfaces is a cumbersome and slow process. Recently, deep learning techniques have been adopted to avoid manual feature extraction and classification in many research and application areas, including optics. In the...journal article 2020