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Khoshfetrat Pakazad, S. (author), Savov, A. (author), Braam, S.R. (author), Dekker, R. (author)
A platform for the batch fabrication of pneumatically actuated Stretchable Micro-Electrode Arrays (SMEAs) by using state-of-the-art micro-fabrication techniques and materials is demonstrated. The proposed fabrication process avoids the problems normally associated with processing of thin film structures on polydimethylsiloxane (PDMS), by first...
journal article 2012