document

Plasma Enhanced Chemical Vapor-Deposition and Characterization of Boron-Nitride Gate Insulators on Inp

Bath, A. (author), Van der Put, P.J. (author), Becht, J.G.M. (author), Schoonman, J. (author), Lepley, B. (author)

journal article 1991

document

Deposition of boron nitride by plasma enhanced CVD using borane amine

Becht, J.G.M. (author), Bath, A. (author), Hengst, E. (author), Van der Put, P.J. (author), Schoonman, J. (author)

conference paper 1991