Insights into the effect of susceptor rotational speed in CVD reactor on the quality of 4H-SiC epitaxial layer on homogeneous substrates

In this work, 4H-SiC homoepitaxial layers were grown on 4°off-axis substrates at different susceptor rotation speeds by using a hot-wall horizontal CVD reactor. The effect of different susceptor rotation speed on the quality of 4H-SiC epitaxial layers in terms of thickness, thickness uniformity, crystallinity, surface morphology and...

Steering Micro-Robotic Swarm by Dynamic Actuating Fields

We present a general solution for steering microrobotic<br/>swarm by dynamic actuating fields. In our approach, the<br/>motion of micro-robots is controlled by changing the actuating<br/>direction of a field applied to them. The time-series sequence<br/>of actuating field’s directions can be computed automatically.<br/>Given a target position in...