Ultraviolet Sensing in WBG: SiC

Nowadays many applications require optical detection of some sorts, ranging from civil to military fields. Depending on the optical source, each sensing element needs to have distinct properties with the spectral range at the top. Choices such as sensitivity and environment play an equally important role, if not more important. The properties of...

High-resolution MEMS inertial sensor combining large-displacement buckling behaviour with integrated capacitive readout

Commercially available gravimeters and seismometers can be used for measuring Earth’s acceleration at resolution levels in the order of ng∕Hz (where g represents earth’s gravity) but they are typically high-cost and bulky. In this work the design of a bulk micromachined MEMS device exploiting non-linear buckling behaviour is described, aiming...

Designing a 100 [aF/nm] capacitive transducer

The mechanical part of inertial sensors can be designed to have a large mechanical sensitivity, but also requires the transduction mechanism which translates this displacement. The overall system resolution in mechanical inertial sensors is dictated by the noise contribution of each stage and the magnitude of each sensitivity, see also Figure...