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Hong, H. (author), Ye, Li (author), Li, Ke (author), Sarro, Pasqualina M (author), Zhang, Kouchi (author), Liu, Zewen (author)
In this paper, we report a modified three step anisotropic wet etching (TSWE) method to fabricate solid-state silicon nanoslits. The slit-opening process is performed by <111> crystal plane etching. The etching rate of the <111> crystal plane is reasonably slow as it is only 1/45 of the <100> etching rate, thus allowing and...
conference paper 2021
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Peng, Xiaoxing (author), Zhang, G. (author), Ji, Bin (author), Lu, L. (author), Hong, F. (author)
conference paper 2009
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Krasilnikov, V.I. (author), Zhang, Z. (author), Hong, F. (author), Ponkratov, D.V. (author), Sun, J.Y. (author)
conference paper 2007