A micro graphene high temperature sensor with a single Si₃N₄ protective layer

Temperature sensors are widely used in industrial production, national defense and military fields. The traditional temperature sensors normally operate in a limited temperature range no more than 200 °C, which cannot be used for extreme high temperature detections. In this paper, a thermal protection method for the sensing graphene membrane...

A Novel High-temperature Pressure Sensor Based on Graphene Coated by Si3N4

The high-temperature pressure sensors have wide applications in aerospace, petroleum, geothermal exploration, automotive electronics, and other fields. However, the traditional silicon-based pressure sensors are restricted to pressure measurement under 120~{\circ }\text{C} and cannot be satisfied to measure the pressure of various gases or...