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Zeng, Simei (author), Tang, Chenggang (author), Hong, H. (author), Yuan, Fang (author), Li, Yuning (author), Wang, Yuqiang (author), Kong, Lingbing (author), Sun, Jingye (author), Zhu, Mingqiang (author), Deng, Tao (author)
The high-temperature pressure sensors have wide applications in aerospace, petroleum, geothermal exploration, automotive electronics, and other fields. However, the traditional silicon-based pressure sensors are restricted to pressure measurement under 120~{\circ }\text{C} and cannot be satisfied to measure the pressure of various gases or...
journal article 2023