From MEMS to NEMS: Scaling Cantilever Sensors

This thesis studies the effects of scaling on the characterisation and readout of micro-electro mechanical systems (MEMS) to nano-electro mechanical systems (NEMS). In particular it focuses on cantilever, which is a basic device building block and an important transducer in many sensing applications. This thesis presents an overview of major...

Dynamic Characterization of Silicon Nitride Cantilevers

This thesis describes a series of experiments on dynamical characterization of silicon nitride cantilevers. These devices play an important role in micro-and nanoelectromechanical systems (MEMS and NEMS). They consist of a mechanical part, a sensor or actuator, and an electronic part for readout and control. The core of NEMS and MEMS, the so...