Effect of polarization in evanescent wave amplification for the enhancement of scattering of nanoparticles on surfaces

We demonstrate the far field detection of low-contrast nanoparticles on surfaces using a technique that is based on evanescent-wave amplification due to a thin dielectric layer that is deposited on the substrate. This research builds upon earlier results where scattering enhancement of 200 nm polystyrene (PSL) particles on top of a glass...

Superresolution effect due to a thin dielectric slab for imaging with radially polarized light

Improving the image quality of small particles is a classic problem and especially challenging when the distance between particles are below the optical diffraction limit. We propose a imaging system illuminated with radially polarized light combined with a suitable substrate that contains a thin dielectric layer to demonstrate that the...

Confocal microscopy with a radially polarized focused beam

Rigorous vectorial focusing theory is used to study the imaging of small adjacent particles with a confocal laser scanning system. We consider radially polarized illumination with an optimized amplitude distribution and an annular lens to obtain a narrower distribution of the longitudinal component of the field in focus. A polarization...

Phase retrieval of the full vectorial field applied to coherent Fourier scatterometry

Coherent Fourier scatterometry is an optical metrology technique that utilizes the measured intensity of the scattered optical field to reconstruct certain parameters of test structures written on a wafer with nano-scale accuracy. The intensity of the scattered field is recorded with a camera and this information is used to retrieve the...