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Middelhoek, S. (author), Noorlag, D.J.W. (author), Steenvoorden, G.K. (author)The penetration of micro-electronics into new markets is seriously hampered by the lack of efficient, low-cost sensors. It is not surprising therefore to find that these devices are the subject of research in many laboratories. This paper gives a review of the most important sensors which are fabricated in silicon planar or hybrid technology....journal article 1983