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Marinescu, O. (author), Bociort, F. (author), Braat, J. (author)When Extreme Ultraviolet mirror systems having several high-order aspheric surfaces are optimized, the configurations often enter into highly unstable regions of the parameter space. Small changes of system parameters lead then to large changes in ray paths, and therefore optimization algorithms crash because certain sssumptions upon which they...conference paper 2004
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Braat, J.J.M. (author), Marinescu, O.E. (author), Bociort, F. (author)Poster presentation Optics Research Group TU Delft in cooperation with ASM Lithograpy and TNOjournal article 2005
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Marinescu, O.E. (author), Bociort, F. (author), Braat, J.J.M. (author)Poster presentation Optics Research Group TU Delft in cooperation with ASM Lithograpy and TNOjournal article 2005
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Braat, J.J.M. (author), Bociort, F. (author), Marinescu, O.E. (author)Poster presentation Optics Research Group TU Delft in cooperation with ASM Lithograpyjournal article 2004
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Braat, J.J.M. (author), Marinescu, O.E. (author), Bociort, F. (author)Poster presentation Optics Research Group TU Delft in cooperation with ASM Lithograpyjournal article 2004