Sadeghian, H. (author), Yang, C.K. (author), Gavan, K.B. (author), Goosen, J.F.L. (author), Van der Drift, E.W.J.M. (author), Van der Zant, H.S.J. (author), Bossche, A. (author), French, P.J. (author), Van Keulen, F. (author) Micro/nano resonant cantilevers with a laser deflection readout have been very popular in sensing applications over the past years. Despite the popularity, however, most of the research has been devoted to increasing the sensitivity, and very little attention has been focused on effects-induced errors. Among these effects, the surface effects...
journal article 2010
