Li, J. (author), Naaborg, Jeroen (author), Louwerse, Marcus (author), Henneken, Vincent (author), Eugeni, Carlo (author), Dekker, R. (author) Our work presents embedded high-density oxide-nitride-oxide (ONO) trench capacitors for power supply decoupling in the next generation of smart catheters. These millimeter-scale smart catheters are using a novel integration platform, Flex-to-Rigid (F2R). In the F2R platform, various functional modules are fabricated or assembled on thin silicon...
conference paper 2020
