Spatially varying aberration calibration using a pair of matched periodic pinhole array masks

For advanced imaging systems, e.g., projection systems for optical lithography, spatially varying aberration calibration is of utmost importance to achieve uniform imaging performance over the entire field-of-view (FOV). Here we present an efficient, accurate, and robust spatially varying aberration calibration method using a pair of 2...

Creation of aspheric interfaces on an electrowetting liquid lens using surface oscillations

A technique to create aspheric surface shapes on commercially available electrowetting liquid lenses is demonstrated. Based on a previously published surface oscillation model a technique using a Hankel transform is proposed and tested experimentally. An alternating actuation voltage is applied to the liquid lens to stimulate surface...