Temperature Field Simulation and optimization for Horizontal 6-inch 4H-SiC Epitaxial CVD Reactor by Induction Heating

Silicon carbide (SiC) epitaxial process is a key step in the fabrication of power devices, and the temperature field inside the reactor chamber plays an essential role in this process. In this paper, the temperature field in the horizontal chemical-vapor-deposition reactor chamber used for growing homo-epitaxial 4H-SiC material is studied using...

Nonlinear Fourier Analysis of Free-Surface Buoy Data Using the Software Library FNFT

Nonlinear Fourier Analysis (NFA) is a powerful tool for the analysis of hydrodynamic processes. The unique capabilities of NFA include, but are not limited to, the detection of hidden solitons and the detection of modulation instability, which are essential for the understanding of nonlinear phenomena such as rogue waves. However, even though...

A Preliminary Study on the Comprehensive Evaluation of the Disaster Prevention System of Large Urban Underground Space

The original urban planning can never meet the requirements of the rapid development and the increasing population in big cities in China. The best way to solve this problem is to develop the underground space (including tunnels). With the exhaustion and saturation of the shallow underground space, the development of urban area is more and more...