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Hoogenboom, J.P. (author), Kruit, P. (author), Zonnevylle, A.C. (author)The invention relates to an apparatus for inspecting a sample, equipped with a charged particle column for producing a focused beam of charged particles to observe or modify the sample, and an optical microscope to observe a region of interest on the sample as is observed by the charged particle beam or vice versa, the apparatus accommodated...patent 2013
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Kruit, P. (author), Hoogenboom, J.P. (author), Zonnevylle, A.C. (author)An inspection apparatus is provided comprising in combination at least an optical microscope and an ion- or electron microscope equipped with a source for emitting a primary beam of radiation to a sample in a sample holder. The apparatus may comprise a detector for detection of secondary radiation backscattered from the sample and induced by the...patent 2012