Bulk Acoustic Wave Based Mocrfluidic Particle Sorting with Capacitive Micromachined Ultrasonic Transducers

The main limitation of acoustic particle separation for microfluidic application is its low sorting efficiency. This is due to the weak coupling of surface acoustic waves (SAWs) into the microchannel. In this work, we demonstrate bulk acoustic wave (BAW) particle sorting using capacitive micromachined ultrasonic transducers (CMUTs) for the first...