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Kawasaki, S. (author), Yeh, Jia-Jun (author), Saccher, M. (author), Li, Jian (author), Dekker, R. (author)The main limitation of acoustic particle separation for microfluidic application is its low sorting efficiency. This is due to the weak coupling of surface acoustic waves (SAWs) into the microchannel. In this work, we demonstrate bulk acoustic wave (BAW) particle sorting using capacitive micromachined ultrasonic transducers (CMUTs) for the first...conference paper 2022
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Li, J. (author), Naaborg, Jeroen (author), Louwerse, Marcus (author), Henneken, Vincent (author), Eugeni, Carlo (author), Dekker, R. (author)Our work presents embedded high-density oxide-nitride-oxide (ONO) trench capacitors for power supply decoupling in the next generation of smart catheters. These millimeter-scale smart catheters are using a novel integration platform, Flex-to-Rigid (F2R). In the F2R platform, various functional modules are fabricated or assembled on thin silicon...conference paper 2020