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Emadi, A. (author), Wu, H. (author), De Graaf, G. (author), Hedsten, K. (author), Enoksson, P. (author), Correia, J.H. (author), Wolffenbuttel, R.F. (author)
This paper presents the design, fabrication and spectral measurements of an Ultra-Violet (UV) Linear Variable Optical Filter (LVOF)-based micro-spectrometer operating in the 300 nm–400 nm wavelength range. The UV LVOF has been fabricated in an IC-Compatible process using resist reflow. Characterization by passing monochromatic light through the...
journal article 2010
document
Emadi, A. (author), Grabarnik, S. (author), Wu, H. (author), De Graaf, R.F. (author), Wolffenbuttel, R.F. (author)
This paper presents spectral measurements using a linear variable optical filter. A LVOF has been developed for operation in the 530 nm–720 nm spectral band and has been fabricated in an IC-compatible process. The LVOF has been mounted on a CMOS camera. A Least Mean Square algorithm has been implemented to calculate the spectrum of light from...
journal article 2010
document
Emadi, A. (author), Grabarnik, S. (author), Wu, H. (author), De Graaf, G. (author), Hedsten, K. (author), Enoksson, P. (author), Correia, J.H. (author), Wolffenbuttel, R.F. (author)
This paper reports on the functional and spectral characterization of a microspectrometer based on a CMOS detector array covered by an IC-Compatible Linear Variable Optical Filter (LVOF). The Fabry-Perot LVOF is composed of 15 dielectric layers with a tapered middle cavity layer, which has been fabricated in an IC-Compatible process using resist...
conference paper 2010
document
Emadi, A. (author), Wu, H. (author), De Graaf, G. (author), Wolffenbuttel, R.F. (author)
This paper reports on a CMOS-Compatible Linear Variable Optical Filter (LVOF) visible micro-spectrometer. The CMOS-compatible post process for fabrication of the LVOF has been used for integration of the LVOF with a CMOS chip containing a 128-element photodiode array and readout circuitry. Fabrication of LVOF involves a process for fabrication...
conference paper 2010
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