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Inductively coupled plasma etching of deep photonic crystal holes in InP using Cl2

Carlstrom, C.F. (author), Van Der Heijden, R. (author), Kok, A.M. (author), Van der Heijden, R.W. (author), Karouta, F. (author), Van Der Tol, J.J.G.M. (author), Nötzel, R. (author), Van Veldhoven, P.J. (author), Salemink, H.W.M. (author)

conference paper 2005